Welcome to our overview of Doctoral Theses on atomic layer deposition (ALD), atomic layer epitaxy, molecular layer deposition (MLD) and atomic layer etching (ALE). This list is expanding upon the thesis listing initiative by professor Riikka Puurunen on the Aalto University ALD openlearning website (also created by professor Riikka Puurunen) and the Virtual Project on the History of ALD (VPHA). Other sources are from the thesis authors, various dissertation databases and website visitors like you.
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