Atomic Layer Deposition

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Scientific Research

Argonne accelerates search for solid-state battery materials

Argonne accelerates search for solid-state battery materials

By Jameirra Atienza 24 Jul 2026

ATLANT 3D: Nanofabricator® Process and Sample Reproducibility Data

ATLANT 3D: Nanofabricator® Process and Sample Reproducibility Data

By Jameirra Atienza 11 Jul 2026

Advancing Ferroelectrics with ALD

Advancing Ferroelectrics with ALD

By Rich West 01 Jul 2026

ATLANT 3D: Self-aligned patterning by area-selective etching of polymers and area-selective atomic layer deposition

ATLANT 3D: Self-aligned patterning by area-selective etching of polymers and area-selective atomic layer deposition

By Jameirra Atienza 20 Jun 2026

ATLANT 3D: Optical color structuring via thin-film interference cavities in ZnO/SiO2 on Si

ATLANT 3D: Optical color structuring via thin-film interference cavities in ZnO/SiO2 on Si

By Brendan Healy 07 Apr 2026

Local edge passivation of laser-scribed cells for compensating cut losses

Local edge passivation of laser-scribed cells for compensating cut losses

By Nathaniel Richey 07 Apr 2026

Cluster Tool Assembly of Stacked Disordered Metasurfaces for complex photonics

Cluster Tool Assembly of Stacked Disordered Metasurfaces for complex photonics

By Brendan Healy 12 Mar 2026

Atomic Layer Deposition on Particles: 35 Years of Progress in One Landmark Review

Atomic Layer Deposition on Particles: 35 Years of Progress in One Landmark Review

By Brendan Healy 28 Jan 2026

Lesker news: High Purity AlScN Thin Films Achieved Through Ultrahigh Purity ALD

Lesker news: High Purity AlScN Thin Films Achieved Through Ultrahigh Purity ALD

By Admin Account 18 Sep 2025

LiNbO₃ cathode-electrolyte interphase on NMC811 using a Swiss Cluster SC-Qube ALD System

LiNbO₃ cathode-electrolyte interphase on NMC811 using a Swiss Cluster SC-Qube ALD System

By Admin Account 08 Sep 2025

Precision at the Atomic Scale: PSU and KJLC Collaboration Earns JVSTA Editor’s Pick

Precision at the Atomic Scale: PSU and KJLC Collaboration Earns JVSTA Editor’s Pick

By Admin Account 01 Aug 2025

Revolutionizing Optical Filter Manufacturing: Cost-Effective Solutions for Hyperspectral and Multispectral Imaging Applications

Revolutionizing Optical Filter Manufacturing: Cost-Effective Solutions for Hyperspectral and Multispectral Imaging Applications

By Inge Weima 24 Jan 2025

Kurt J. Lesker: New Ultra-high purity Plasma ALD systems for non-oxide materials

Kurt J. Lesker: New Ultra-high purity Plasma ALD systems for non-oxide materials

By Admin Account 10 Jan 2025

Georgia Tech Team Explores Crystallization of Atomic Layer Deposited TiO2

Georgia Tech Team Explores Crystallization of Atomic Layer Deposited TiO2

By Admin Account 23 Jun 2023

ALD Around the World: Hot wire ALD at the IDS Group at the University of Twente

ALD Around the World: Hot wire ALD at the IDS Group at the University of Twente

By Tiago Belé 26 May 2023

High Speed Atmospheric Pressure Plasma Enhanced Spatial ALD of Si3N4

High Speed Atmospheric Pressure Plasma Enhanced Spatial ALD of Si3N4

By Tiago Belé 14 May 2023

Introducing the Revolutionary Open-Air Spatial ALD of Cu, Cu2O, and CuO

Introducing the Revolutionary Open-Air Spatial ALD of Cu, Cu2O, and CuO

By Abhishekkumar Thakur 18 Apr 2023

Surface-activated ALD for wafer bonding beyond silicon

Surface-activated ALD for wafer bonding beyond silicon

By Tiago Belé 11 Mar 2023

Vapor Phase Infiltration: The Key To Oksana Yurkevich's Self-Healing Semiconductors [new thesis]

Vapor Phase Infiltration: The Key To Oksana Yurkevich's Self-Healing Semiconductors [new thesis]

By Tiago Belé 27 Jan 2023

Georgia Tech Team invents Pulsed Heating ALD to create heteroepitaxial ZnO Thin Films

Georgia Tech Team invents Pulsed Heating ALD to create heteroepitaxial ZnO Thin Films

By Tiago Belé 12 Sep 2022

Using Atomic Layer Deposition, a Group of Scientists Prompted the Generation of Fe-In-S Clusters in ZnInS, Enhancing Pec Outcomes.

Using Atomic Layer Deposition, a Group of Scientists Prompted the Generation of Fe-In-S Clusters in ZnInS, Enhancing Pec Outcomes.

By Rayan Wehbe 28 Aug 2022

Plasma Enhanced Atomic Layer Deposition of TiN for plasmonic films by Boston and Purdue collaboration.

Plasma Enhanced Atomic Layer Deposition of TiN for plasmonic films by Boston and Purdue collaboration.

By Tiago Belé 25 Aug 2022

Singapore Group: ALD is Merged with Joule Heating to Produce Modern Noble Alloys

Singapore Group: ALD is Merged with Joule Heating to Produce Modern Noble Alloys

By Tiago Belé 15 Aug 2022

Michigan Team take control of 3D print colors by modifying inorganic films in ALD coatings

Michigan Team take control of 3D print colors by modifying inorganic films in ALD coatings

By Tiago Belé 04 Aug 2022

Role of Anionic Backbone in NHC-Stabilized Coinage Metal Complexes

Role of Anionic Backbone in NHC-Stabilized Coinage Metal Complexes

By Joana Joana 16 May 2022

Atomic layer deposition and atomic layer etching enable advanced spintronics fabrication

Atomic layer deposition and atomic layer etching enable advanced spintronics fabrication

By Garima S. 01 May 2022

ALD-based Functional Materials shows encouraging performance in Aquatic Environment Remediation

ALD-based Functional Materials shows encouraging performance in Aquatic Environment Remediation

By Admin Account 22 Apr 2022

Stanford group Bent uncovers ideal qualities of Ru ALD films made with carbonyl-based precursors

Stanford group Bent uncovers ideal qualities of Ru ALD films made with carbonyl-based precursors

By MailhotK MailhotK 21 Apr 2022

CSUN group shows how a-alumina ALD coating improves Li-S battery electrodes with DFT calculations

CSUN group shows how a-alumina ALD coating improves Li-S battery electrodes with DFT calculations

By MailhotK MailhotK 20 Apr 2022

BarcelonaTech Researchers send jolts of innovation into solar cell technology with ALD

BarcelonaTech Researchers send jolts of innovation into solar cell technology with ALD

By MailhotK MailhotK 19 Apr 2022