Atomic Layer Deposition
SOCIAL
Beneq
Leading the ALD market with products for R&D (TFS 200, TFS 500, R2), semiconductors (Transform), 3D & batch production (P400A, P800, P1500), ultra-fast spatial ALD (C2R) & roll-to-roll ALD (Genesis).
ALD GROUPS
Address: Amsterdam, Netherlands
Type: Research Institutes
The ALD Journal and website is an ALD community organization, hosting scientific articles and ALD news around the world.
LinkedIn links of group members:
Keywords:
Area Selective ALD, Atomic Layer Etching, Molecular Layer Deposition, Particle ALD, Plasma ALD, Precursor Chemistry, Reactor Design, Spatial ALD, Vapor Phase Infiltration, Experimental R&D, Theory or Modelling, Catalytic and functionalization, Displays, Epitaxy, Fuel Cells, Batteries, Solar, Healthcare, LED, Photonic & Optics, Memory technologies, MEMS, sensors & actuators, Metal organic frameworks, Nanostructures, Polymers or Textiles, Power or RF devices, Semiconductor, Thin film growth & properties, Tribology
Address: Chicago, USA
Type: Universities
Prof. Omar K. Farha’s research seeks to solve exciting problems in chemistry and materials science ranging from energy and environment related applications to challenges in national defense by employing atomically precise functional materials. By exploiting the modular nature of metal–organic frameworks (MOFs) and porous organic polymers (POPs), we work to fundamentally understand the role of three-dimensional architecture in modifying a material’s function for applications in gas storage and separation, catalysis, water remediation and detoxification of chemical warfare agent simulants.
LinkedIn links of group members:
Keywords:
Experimental R&D, Metal organic frameworks
Address: Austin, USA
Type: Universities
We study surface and materials chemistry as it relates to the growth and properties of ultrathin metal and metal oxide films for optical and electronic applications. We seek to understand and describe nucleation and growth of films and nanostructures, structure-property relationships, and site-specific reaction
LinkedIn links of group members:
Keywords:
Area Selective ALD, Experimental R&D, Thin film growth & properties, Semiconductor
Address: Raleigh, USA
Type: Universities
Parsons’ research explores chemical reactions on surfaces, particularly for formation of thin films by atomic layer deposition. He joined the faculty at NC State in 1992, after a postdoc position at IBM TJ Watson Research Center. His research interests include: Atomic Layer Deposition and Related Processes; Physics of Electronic Materials and Devices; Polymer Fiber and Film Formation, Coating and Chemical Surface Modification; Metal-Organic-Framework (MOF) Materials and Thin Films; Advanced Energy Storage and Solar Energy Conversion. His expertise also includes: Thin Film Transistor (TFT) and Flat Panel Active Matrix Display (esp. AMLCD) Devices and Manufacturing, Chemical Vapor Deposition, Plasma Enhanced CVD, Plasma Etching and other processes.
LinkedIn links of group members:
Keywords:
Plasma ALD, Precursor Chemistry, Semiconductor, Polymers or Textiles, Catalytic and functionalization, Metal organic frameworks, Fuel Cells, Batteries, Solar, Thin film growth & properties
Address: Brno, Czech Republic
Type: Research Institutes
Research areas
Nanomaterials with low dimensions (100 nm and below) for applications in power engineering, biology and catalysis.
Main objectives
The main objective of the research is a synthesis of new low dimensional structures, such as nanotubes, nanolayers, nanofibers, by various means. It includes also the necessary investigation of the structure-property relationship of these materials. The most promising materials are explored in various fields, such as photovoltaics, catalysis, batteries, etc. together with cooperating partners.
Content of research
Self-organized valve metal oxide nanostructures by electrochemical anodization
development of novel tubular shapes and morpologies
investigation of various Ti and Ti-based substrates for nanotube synthesis
improvement of the tube ordering towards ideal hexagonal ordering
understanding their structure/properties/application relationship
Atomic layer Deposition of Various funcitonal coatings
functionalization of nanomaterials by secondary materials
development of new precursors and processes for new advanced coatings
realization of complete functional devices
Inorganic and polymeric nanofibers and microfibers
new formulations of solutions for inorganic fibers by centrifugal spinning and electrospinning
synthesis vs. calcination vs. property relationship
evaluation of the potential for various applications
LinkedIn links of group members:
Keywords:
Experimental R&D, Catalytic and functionalization, Fuel Cells, Batteries, Solar, Nanostructures, Thin film growth & properties
Address: Oslo, Norway
Type: Universities
NAFUMA focuses on inorganic functional materials and nanostructures. The main objective is to understand their physical properties on the basis of crystal structure and chemical bonding (electronic structure) and on this background be able to synthesize novel materials with specific properties by design. This implies close integration of experimental and theoretical modeling activities. Organic- inorganic hybrid materials / MLD growth. Modelling the evolution of texture in ALD growth. Complex oxides. Battery materials. Nanostructures. Materials for photovoltaics. Characterisation techniques
LinkedIn links of group members:
Keywords:
Molecular Layer Deposition, Plasma ALD, Experimental R&D, Theory or Modelling, Catalytic and functionalization, Epitaxy, Fuel Cells, Batteries, Solar, Thin film growth & properties, Nanostructures
Address: Incheon, South Korea
Type: Research Institutes
Professor Han-Bo-Ram Lee’s current research interests and topics are focused on understanding and controlling surface chemistry and reactions, and applying this knowledge to various applications of which properties could be improved by functionalization of surface from nanoscopic to macroscopic ranges. Atomic-level theoretical calculations using density functional theory (DFT) and Monte Carlo (MC) simulation are employed, and experimental controls and functionalization of surface properties are realized by atomic layer deposition (ALD). Metal deposition using ALD.
LinkedIn links of group members:
Keywords:
Area Selective ALD, Theory or Modelling, Experimental R&D, Thin film growth & properties, Nanostructures, Semiconductor, Polymers or Textiles, Catalytic and functionalization
Address: Helsinki, Finland
Type: Universities
Prof. Ritala has one of the largest bodies of work in the field of Atomic Layer Deposition, including development of novel materials, see https://researchportal.helsinki.fi/en/persons/mikko-ritala/publications/
LinkedIn links of group members:
Keywords:
Area Selective ALD, Atomic Layer Etching, Molecular Layer Deposition, Plasma ALD, Experimental R&D, Theory or Modelling, Epitaxy, Catalytic and functionalization, Semiconductor, Thin film growth & properties, Nanostructures
Address: lille, france
Type: Research Institutes
Thermal ALD
PE-ALD
FAMILLE DE MATÉRIAUX
Oxydes
Films métalliques
Nitrures
Composés lithiés
APPLICATIONS
Transition énergetique (catalyse, PV, batteries, piles à combustibles, nucléaire, ..)
Transition numérique: (écrans, capteurs, micro-electronique, Qubits, ...)
LinkedIn links of group members:
Keywords:
Plasma ALD, Experimental R&D, Fuel Cells, Batteries, Solar, Semiconductor, Catalytic and functionalization
Address: Marseille , France
Type: Research Institutes
Thermal ALD
PE-ALD
Croissance, instrumentation in-situ
FAMILLE DE MATÉRIAUX
Oxydes
Films métalliques
Nitrures
APPLICATIONS
Transition énergetique (catalyse, PV, batteries, piles à combustibles, nucléaire, ..)
Environnement (traitement de l'eau, de l'air, ..)
RÉACTEUR(S) ALD
Réacteur maison
Veeco/Cambridge Nanotech
LinkedIn links of group members:
Keywords:
Plasma ALD, Experimental R&D, Catalytic and functionalization, Fuel Cells, Batteries, Solar, Nanostructures, Semiconductor, Thin film growth & properties
Address: Johannesburg, south africa
Type: Universities
The ALD Research Centre will adopt the advanced ALD practices and focus on the development of ALD research capacities in South Africa. Strategically, ALD RC will prioritize the research activities in both fundamental research and applied research:
Fundamental research
The Centre will focus on six specific research areas to provide UJ with a better understanding of the ALD technologies and important advances in the future 4IR world. The immediate research focus areas are exampled below:
ALD Operations: focus on the adoption of advanced ALD processes and design of the novel ALD reactors to provide the best supports.
Smart Energy: focus on ALD fabrication process of advanced catalysts for H2 & fuel cells technologies, membrane with improved performance, etc.
Smart Manufacturing: focus on the ALD smart machining, automation and Industrial Internet of things (IIOT) to demonstrate the concept of automation and IIOT for the future smart manufacturing in the 4IR world.
Smart Materials: focus on the advancements for ALD-MOFs, ALD-graphene and ALD-drugs delivery/discoveries.
Smart Membrane: focus on ALD-membrane with improved performance, etc.
Computational Modelling and Simulation: focus on the modelling and simulation to predicate the results from the research design to guide the ALD practices.
LinkedIn links of group members:
Keywords:
Plasma ALD, Theory or Modelling, Metal organic frameworks, Fuel Cells, Batteries, Solar
University, Institute or Company name : CNRS
Address: Nantes, France
Type: Research Institutes
PE-ALD
Précurseurs
Simulations et/ou modélisation
Croissance, instrumentation in-situ
Atomic Layer Etching
FAMILLE DE MATÉRIAUX
Oxydes
Sulfures
Nitrures
Oxynitrures avec inclusions métalliques
APPLICATIONS
Transition énergetique (catalyse, PV, batteries, piles à combustibles, nucléaire, ..)
Transition numérique: (écrans, capteurs, micro-electronique, Qubits, ...)
LinkedIn links of group members:
Keywords:
Plasma ALD, Experimental R&D
University, Institute or Company name : Leibniz Institute for Solid State and Materials Research
Address: Dresden, Germany
Type: Research Institutes
Our group has been working in this area for many years. Various oxide systems, metals, transition metal dichalcogenides, and nitrides have been developed for different applications including but not limited to:
2D materials and topological insulators,
Grain modifications of thermoelectric materials
Surface modification of active battery components
Protection layers and encapsulations
Biocompatible thin films
Planar, porous, and powder samples can be coated with the listed materials. Other materials are possible after consultation.
LinkedIn links of group members:
Keywords:
Area Selective ALD, Molecular Layer Deposition, Plasma ALD, Particle ALD, Reactor Design, Precursor Chemistry, Coating Services Provided, Experimental R&D, Memory technologies, MEMS, sensors & actuators, Nanostructures, Semiconductor, Thin film growth & properties, Fuel Cells, Batteries, Solar, Polymers or Textiles, Metal organic frameworks, Healthcare, Catalytic and functionalization
University, Institute or Company name : Tyndall National Institute
Address: Cork, Ireland
Type: Research Institutes
The Tyndall MMD group explores modelling of materials for a range of device applications. For this research cluster the focus is on atomic level processing, that is ALD, ALE and MLD, where the group has taken a leading position in the modelling of ALE and ALD processes. More recently we have started working on piezoelectric and multiferroic materials for new devices, as well as triboelectric generation.
Funding for this work has been secured through Science Foundation Ireland partnerships including the US-Ireland Program, the SFI-NSF China program, the H2020 M-ERA.net.2 co-fund, SFI Frontiers for the Future and the SFI-EPSRC; these all involved close cooperation with experimental groups across Tyndall, Ireland, UK, Spain, Netherlands, USA and China and our ability to work closely with experiment on common problems is a key attribute of the group’s activities. Other funding includes the MSCA ITN HYCOAT (www.hycoat.eu), on molecular layer deposition, two Enterprise Ireland Innovation Partnerships and direct industry support. The latter show the relevance of our work to industry problems, allowing us to grow our links to key industry players and showcase the quality of this work. The value of support is in excess of € 2.5 million and team members have gone onto senior industry roles and permanent academic positions.
https://scholar.google.com/citations?hl=en&user=NHw-9lYAAAAJ&view_op=list_works&sortby=pubdate
https://orcid.org/0000-0002-5224-8580
Keywords:
Atomic Layer Etching, Molecular Layer Deposition, Precursor Chemistry, Vapor Phase Infiltration, Theory or Modelling, Catalytic and functionalization, Memory technologies, MEMS, sensors & actuators, Nanostructures, Semiconductor, Thin film growth & properties, Tribology
University, Institute or Company name : FAU -- Friedrich-Alexander-Universität Erlangen-Nürnberg
Address: Erlangen, Germany
Type: Universities
We develop chemical interface engineering methods for green energy conversion applications.
Energy conversion between its light, electrical, and chemical forms always entails the transfer of charge carriers at interfaces as the crucial step. Here, “the interface is the device” — in stark contrast to the bulk amounts of materials traditionally utilized in classical energy conversion devices. Therefore, smart engineering of interfaces enables one to minimize the utilization of expensive, highly purified, rare, or toxic materials. In fact, we contend that we can even replace those materials with inexpensive, abundant, innocuous ones using a combination of interface nanostructuring (on the scale of 20 to 5000 nm) and interface functionalization by ultrathin coatings (on the scale of 0.5 to 50 nm). To achieve the level of control required, we develop chemical nanostructuring methods based mostly on atomic layer deposition (ALD) and electrochemistry. We then implement them towards devices, the functional performance of which depends on the degree of perfection achieved preparatively.
LinkedIn links of group members:
Keywords:
Area Selective ALD, Experimental R&D, Catalytic and functionalization, Fuel Cells, Batteries, Solar, Nanostructures, Metal organic frameworks, Thin film growth & properties, Semiconductor
University, Institute or Company name : University of Colorado Boulder
Address: Boulder, USA
Type: Universities
The Steven M. George research group concentrates on surface chemistry, thin-film growth & etching, and nanoscale engineering. We focus on atomic layer deposition (ALD), atomic layer etching (ALE), and molecular layer deposition (MLD). We develop the science and engineering of atomic layer processing (ALP).
In the research group, we welcome the diversity of students, researchers, and collaborators. We strive for an accessible, inclusive, and equitable work environment.
Keywords:
Area Selective ALD, Atomic Layer Etching, Molecular Layer Deposition, Particle ALD, Reactor Design, Experimental R&D, Coating Services Provided, Catalytic and functionalization, Fuel Cells, Batteries, Solar, Semiconductor, Thin film growth & properties, Polymers or Textiles, Nanostructures, MEMS, sensors & actuators, Memory technologies, LED, Photonic & Optics, Healthcare, Displays, Power or RF devices
University, Institute or Company name : Maxima Sciences LLC
Address: Montgomery, OH, 45242, United States
Type: Companies
Maxima Sciences llc provides ALD Consulting, Coating Services, and sells the R-ALD research & development system.
LinkedIn links of group members:
Keywords:
Molecular Layer Deposition, Atomic Layer Etching, Reactor Design, Experimental R&D, Industrial Production, Coating Services Provided, Displays, Fuel Cells, Batteries, Solar, MEMS, sensors & actuators, Thin film growth & properties, Semiconductor, Tribology
University, Institute or Company name : Leipzig University
Address: Leipzig, Germany
Type: Universities
University-based research group working on theory and modelling of ALD, especially on area-selective ALD.
Adsorption, reaction mechanisms, packing, SMI-based approaches, decomposition, dynamics, etc.
Collaboration with various experimental groups on AS-ALD.
LinkedIn links of group members:
Keywords:
Area Selective ALD, Theory or Modelling
University, Institute or Company name : University Grenoble Alpes, LMGP
Address: Grenoble, France
Type: Universities
The Materials and Physical Engineering Laboratory (LMGP) is a research laboratory in materials science and materials for biomedical engineering. It is a joint Research Unit (UMR 5628) of CNRS and Grenoble INP within the Grenoble Alpes University.
Thanks to the dynamism of its three research teams and the favorable multidisciplinary environment, LMGP has gained an international reputation in the fields of crystal growth, nanomaterials and structured thin film materials and interaction of materials with biological matter. The interaction between the teams help fostering synergies and new skills. LMGP develops functional materials for applications in the field of microelectronics, energy, and health and thus participates in applied research, in close relationship with companies. With about fifty researchers, lecturers, engineers, technicians and administrative staff, the laboratory welcomes every year about 60 students and non-permanent researchers at all levels.
Keywords:
Spatial ALD, Experimental R&D, Fuel Cells, Batteries, Solar, Nanostructures, Semiconductor, Thin film growth & properties, Displays, Catalytic and functionalization
University, Institute or Company name : CNRS - UM - ENSCM
Address: Montpellier, France
Type: Research Institutes
The team's main activities entail the development of novel electrolyte and electrode materials for proton/anion exchange membrane fuel cells and electrolyzers. As an example, we are preparing and characterizing nanostructured electrocatalyst supports (based on carbon, metal oxides, and carbide nanofibres), a range of low loaded PGM catalysts (Pt and IrO2 nanoparticles and thin films, Pt/Rare Earth Metal nanoalloys) and ionomer membranes reinforced with polymer fiber webs.
LinkedIn links of group members:
Keywords:
Experimental R&D, Fuel Cells, Batteries, Solar
University, Institute or Company name : Technion- Israel Institute of Technology
Address: Haifa, Israel
Type: Universities
Our lab goal is to enhance the sustainable use of resources and improve nanotechnology by developing new nanofabrication processes and new hybrid organic-inorganic nanomaterials. We address challenges in a range of fields, from improving semiconductor nano-manufacturing to enhancing clean energy storage, clean water production, and sustainable plastics solution, using our expertise in nanomaterials and nanostructures. Our work is based on combining inorganic materials synthesis, polymer assembly and patterning, and advanced nanoscale characterization approaches. We specialize in the growth of inorganic materials onto and within polymers using atomic layer deposition (ALD) technologies (sequential infiltration synthesis- SIS and vapor phase infiltration- VPI) and in molecular layer deposition (MLD), as well as in electron microscopy characterization (TEM, SEM, FIB), including 3D characterization, to probe our nanomaterials and nanostructures. We work on understanding the fundamental behavior of molecules in these nanoscale-based systems and utilize this knowledge to create novel nanostructures that can tackle some of the pressing challenges in the water, energy, manufacturing, and sustainability fields.
LinkedIn links of group members:
Keywords:
Molecular Layer Deposition, Vapor Phase Infiltration, Experimental R&D, Fuel Cells, Batteries, Solar, LED, Photonic & Optics, MEMS, sensors & actuators, Nanostructures, Polymers or Textiles, Semiconductor, Thin film growth & properties, Catalytic and functionalization
University, Institute or Company name : CIC nanoGUNE
Address: San Sebastian, Spain
Type: Research Institutes
The nanomaterials group at CIC nanoGUNE performs research on functional materials, dominantly organic-inorganic hybrid materials, fabricated with vapor phase processess (VPI, MLD, ALD, CVD, etc.). Our focus lies on applications in the energy sector, textile, corrosion protection, packaging, bioapplications, and emerging electronics. We are involved in a variety of regional, national and international research projects of fundamental and industrial nature. We also host a startup company in-house which engineers and commercializes ALD/MLD/VPI instrumentation.
LinkedIn links of group members:
Keywords:
Molecular Layer Deposition, Particle ALD, Plasma ALD, Reactor Design, Vapor Phase Infiltration, Experimental R&D, ALD equipment sales, Coating Services Provided, Catalytic and functionalization, Fuel Cells, Batteries, Solar, Healthcare, LED, Photonic & Optics, MEMS, sensors & actuators, Nanostructures, Polymers or Textiles, Thin film growth & properties
University, Institute or Company name : Georgia Tech
Address: Atlanta, United States
Type: Universities
The Losego Lab seeks a Phenomenological Understanding of Material Processes -- both in the making of materials (processing) and their performance (transport phenomena, chemical stability, etc.). Our goal is often to explain these processes with fundamental phenomenological models, providing new insights to materials design. We largely focus on the use of vapor phase processes to make and modify materials (e.g., atomic layer deposition [ALD], vapor phase infiltration [VPI], and physical vapor deposition [PVD]), with particular interest in understanding the synthesis and complex chemical and physical structure of organic-inorganic hybrid materials. The PI is committed to training creative and rigorous scientists and engineers that explore out-of-the-box ideas with well-reasoned methods.
LinkedIn links of group members:
Keywords:
Particle ALD, Reactor Design, Vapor Phase Infiltration, Experimental R&D, Catalytic and functionalization, Epitaxy, Nanostructures, Polymers or Textiles, Semiconductor, Thin film growth & properties
University, Institute or Company name : Universidad Técnica Federico Santa María
Address: Santiago, Chile
Type: Universities
I'm Assistant Professor in the Department of Chemical and Environmental Engineering at the Technical University Federico Santa María in Santiago, Chile.
My group focus on the fundamental understanding of ASD and ALD processes using computational modeling.
LinkedIn links of group members:
Keywords:
Area Selective ALD, Precursor Chemistry, Theory or Modelling, Semiconductor, Thin film growth & properties
University, Institute or Company name : Missouri State University
Address: Springfield, MO, USA
Type: Universities
Developing AI-based forcefields to model the ALD processes.
Keywords:
Theory or Modelling
University, Institute or Company name : 4D LABS at Simon Fraser University
Address: Burnaby, Canada
Type: Research Institutes
4D LABS is an open-access applications- and science-driven Core Facility at Simon Fraser University's Burnaby campus in British Columbia, Canada.
We offer fully customized research and development programs for researchers, start-ups and industry.
Our Vision: Living better through material science and engineering.
Our Mission: Providing clients with material science services, tailored to their specific needs, that fast track their technology’s deployment.
Keywords:
Plasma ALD, Experimental R&D, Thin film growth & properties, Semiconductor, Nanostructures, MEMS, sensors & actuators, Fuel Cells, Batteries, Solar
University, Institute or Company name : CNyN-UNAM
Address: ensenada, México
Type: Research Institutes
Our interest involves bandpass filters and mirrors, waveguides, 2D solid electrolytes for energy storage, photocatalysis, transparent conductive oxides, and theoretical models on the interaction of ALD precursors and surfaces.
The team leader is Dr. Hugo Tiznado.
https://scholar.google.com/citations?user=TMM8G5MAAAAJ&hl=en
LinkedIn links of group members:
Keywords:
Plasma ALD, Particle ALD, Experimental R&D, Theory or Modelling, Catalytic and functionalization, Fuel Cells, Batteries, Solar, LED, Photonic & Optics, Memory technologies, Nanostructures, Semiconductor, Thin film growth & properties
University, Institute or Company name : ICMAB-CSIC
Address: BARCELONA, SPAIN
Type: Research Institutes
Development of functional complex oxide films and membranes by chemical methods for energy and electronic applications
Keywords:
Experimental R&D, Epitaxy, Nanostructures, Thin film growth & properties
University, Institute or Company name : Brookhaven National Laboratory
Address: Upton, NY 11973, USA
Type: Research Institutes
Chang-Yong Nam at Center for Functional Nanomaterials of Brookhaven National Laboratory leads a research program focused on development and application of ALD techniques, especially vapor-phase infiltration, towards microelectronics (e.g., hybrid EUV photoresist) and energy technologies (e.g., membranes)
LinkedIn links of group members:
Keywords:
Vapor Phase Infiltration, Catalytic and functionalization, Fuel Cells, Batteries, Solar, Polymers or Textiles, Semiconductor
Ascensus Specialties
A manufacturer of specialty chemicals for electronics, catalysts and life sciences. Explore the widest range of ALD precursors on the market!
