The synthesis and properties of thin film structures based on aluminum and tantalum oxides

Author
A. I. Klusevich
Year
1990
Language of the thesis
Russian
Thesis name in original language
Синтез и свойства тонкопленочных структур, созданых на базе оксидов алюминия и тантала (translated by Oksana Yurkevich)
Abstract & Cover
Source of Information
Malygin et al., Chem. Vap. Deposition 21 (2015) 216-240
University
LTI by Lensovet
(Leningrad, USSR)
LinkedIn
linkedin invite