The reaction of ammonia with a copper-titanium and copper-vanadium films synthesized on the surface of copper

Author
S. E. Kurashvili
Year
1984
Language of the thesis
Russian
Thesis name in original language
Взаимодействие аммиака с медно-титан- и медно-ванадийхлоридными пленками, синтезированными на поверхности меди
Abstract & Cover
Source of Information
Malygin et al., Chem. Vap. Deposition 21 (2015) 216-240
University
LTI by Lensovet
(Leningrad, USSR)
Other notes
Oksana: Chemical assemble method. ALD cycle not mentioned (at least at the introduction). Thickness of the coatings were 100-500 nm.
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