Synthesis of thin oxide films on the surface of tantalum and gallium arsenide, their structure and properties

Author
A. L. Egorov
Year
1983
Language of the thesis
Russian
Thesis name in original language
Синтез оксидных пленок на поверхности тантала и арсенида галлия, их структура и свойства
Abstract & Cover
Source of Information
Malygin et al., Chem. Vap. Deposition 21 (2015) 216-240
University
LTI by Lensovet
(Leningrad, USSR)
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