Synthesis and study of thin oxide layers on the surface of single-crystal silicon

Author
R. R. Rachkovskii
Year
1972
Language of the thesis
Russian
Thesis name in original language
Синтез и исследование тонких окисных слоев на поверхности монокристаллического кремния
Abstract & Cover
Source of Information
Malygin et al., Chem. Vap. Deposition 21 (2015) 216-240
University
LTI by Lensovet
(Leningrad, USSR)
Other notes
Oksana: besides the analytical chemistry techniques, ellipsometry and quartz surfaces were used
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