Synthesis and study of thin oxide layers on the silicon surface

Author
G.V. Sveshnikova
Year
1971
Language of the thesis
Russian
Thesis name in original language
Синтез и исследование тонких оксидных слоев на поверхности кремния
Abstract & Cover
Source of Information
Malygin et al., Chem. Vap. Deposition 21 (2015) 216-240
University
LTI by Lensovet
(Leningrad, USSR)
Other notes
Oksana: modification of the silica surface instead of silicagel (as was common for the early works in USSR). Besides analytical chemistry techniques, ellipsometry and quartz surfaces were used
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