Synthesis and study of oxide coatings obtained by molecular layer deposition technique on the surface of semiconductors

Author
V. E. Drozd
Year
1978
Language of the thesis
Russian
Thesis name in original language
Синтез и исследование оксидных покрытий, полученных методом молекулярного наслаивания на поверхности полупроводников
Abstract & Cover
Source of Information
Malygin et al., Chem. Vap. Deposition 21 (2015) 216-240
University
LTI by Lensovet
(Leningrad, USSR)
Other notes
Oksana: performed the vaccum reactor with in-situ ellipsometry and Peltier element (1975), before him atmospheric pressure reactors were used.
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