Studies on precursors and their application in the atomic layer epitaxy growth of thin films for electroluminescent devices

Author
Marja Tiitta
Year
1998
Abstract & Cover
Source of Information
FinALD40 exhibition material, http://www.aldcoe.fi/events/finald40.pdf
University
Helsinki University of Technology, Department of Chemical Technology, Laboratory of Inorganic and Analytical Chemistry
(Helsinki, Finland)
LinkedIn
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