Molybdenum nitride thin films on micro- and nanopatterned substrates: atomic layer deposition and applications

Author
Ville Miikkulainen
Year
2008
Abstract & Cover
Source of Information
FinALD40 exhibition material, http://www.aldcoe.fi/events/finald40.pdf
University
University of Joensuu, Department of Chemistry
(Joensuu, Finland)
LinkedIn
linkedin invite