Exploiting atomic layer epitaxy thin film deposition technique in solid-state chemical sensor applications

Author
Mikko Utriainen
Year
1999
Abstract & Cover
Source of Information
FinALD40 exhibition material, http://www.aldcoe.fi/events/finald40.pdf
University
Helsinki University of Technology, Department of Chemical Technology, Laboratory of Inorganic and Analytical Chemistry
(Espoo, Finland)
LinkedIn
linkedin invite