Atomic layer epitaxy growth of titanium, zirconium and hafnium dioxide thin films

Author
Mikko Ritala
Year
1994
Abstract & Cover
Source of Information
FinALD40 exhibition material, http://www.aldcoe.fi/events/finald40.pdf
University
University of Helsinki, Department of Chemistry, Laboratory of Inorganic Chemistry
(Helsinki, Finland)
LinkedIn
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