Manufacturer
Beneq
Product model
Prodigy™
Type of product
200 mm Semiconductor Wafer Batch Production Tool
Description

Beneq Prodigy™ is the ideal manufacturing solution for VCSEL, LED and MEMS manufacturers and foundries looking to enhance the device performance and reliability through an affordable stand-alone ALD batch tool. Beneq Prodigy provides best-of-breed passivation and/or encapsulation films across multiple wafer types and sizes. 

Prodigy is a simple, yet elegant, solution for enhancing device performance on 75–200 mm wafers with a low-cost batch tool with the latest ALD technology.

Prodigy offers pure simplicity through an automated loader with horizontal wafer handling and easy maintenance & serviceability with easy side access.

Technical features

Specifications:

Dimensions

3320x910x2400 mm

Integration

Stand-alone, SECS/GEM, SEMI S2 compliant

Batch Size

Up to 25x200 mm wafers, 50x150 mm wafers, 75x100 mm wafers

Safety Standards

SEMI S2

ALD Processes

Al2O3, TiO2, SiO2 and others

Processing Temperature

< 420 oC 

Throughput: Al2O3 – 300 oC – 50 nm

>14 wafers/hour, 50 pcs 150 mm wafer batch

Substrate Sizes

75, 100, 150, or 200 mm

Product Links
Beneq Prodigy™ manufacturer page
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