Manufacturer
Beneq
Product model
P400A
Type of product
Batch Production Equipment
Description

The Beneq P400A is built specifically to coat different types of substrates in an optimized batch size – large enough to offer significant capacity, but small enough to maintain excellent uniformity within batches and short cycle times. Our customers use the P400A for optical coatings and applications where ALD is used on glass or metal sheets. 

The Beneq P400A is a highly optimized, production-proven batch ALD system for high volume manufacturing of optical coatings and moisture barriers. P400A is large enough to offer significant capacity, but small enough to maintain excellent uniformity within batches and short cycle times.

Technical features

Specifications:

Process Type

Thermal ALD

Integration

Stand-alone

Dimensions

2400×930×2420 mm 

Vacuum Chamber Dimensions

Ø: 400 mm

Temperature Range

25–550 °C

Substrate Type

Wafers Glass or metal sheets 

3D and freeform parts

Substrate Space Example

240×240×720 mm 

370×470×25 mm

Product Links
Beneq P400A manufacturer page
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