Manufacturer
Beneq
Product model
P1500
Type of product
Batch Production Equipment
Description

The Beneq P1500 is the world’s largest ALD reactor. With a vacuum chamber width of 1.7 meters, this tool is uniquely designed to coat very wide area substrates and large batches of 3D components. As the latest innovation in Beneq’s P-Series, the P1500 continues to enable ALD on the biggest scale with viable high-volume manufacturing solutions.

The P1500 is used for optical coatings on large diameter substrates, anticorrosive coatings of semiconductor equipment parts, and various applications where ALD is used on glass or metal sheets.

Technical features

Specifications:

Process Type

Thermal ALD

Integration

Stand-alone

Dimensions

6195 x 2480 x 2600 mm

Vacuum Chamber Dimensions

W: 1700 mm

Temperature Range

25–400 °C

Substrate Type

Glass or metal sheets 

3D and freeform parts

Substrate Space Example

1300 x 2400 x 750 mm
Product Links
Beneq P1500 manufacturer page
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