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By Agnieszka Gozdek / February 15, 2026

Sunday Dose of ALD week 7, 2026. Read all ALD related scientific articles of Feb 09 - 15.

Made possible by support from Beneq, Forge Nano, Atlant 3D, Swiss Cluster, Kurt J. Lesker, and Encapsulix!

Mechanism of Vapor-Phase Infiltration of Organometallic Hf in Poly (Methyl Methacrylate) for Hybrid Resist Applications

Beyond ZrO₂: Rutile TiO₂ as the Dielectric Platform for Next-Generation DRAM Capacitors

Atomic-layer Additive Manufacturing of Indium (III) Sulfide

Contrasting Effects of TiO2 and TiN Thin Shells Grown on rGO Negative Electrodes Using Atomic Layer Deposition for Supercapacitor Applications

Polymer-Derived Amorphous Aluminosilicate Nanomembranes for H₂ Purification

Noble-metal-functionalized MoS₂ Catalysts Prepared by Atomic Layer Deposition for Hydrogen Evolution Reaction

Defect Properties and Band Energetics of Atomic Layer Deposited MoO_X on Crystalline Si

Molecular dynamics simulation of atomic layer etching for sidewall damage recovery in GaN-based structures

[HTML] In-Situ Vacuum Oxidation of ALD-SnO2 Layer Enabling Highly Efficient and Stable Perovskite Solar Cells

Star Grazing with Alumina Grass: Antireflection coatings in the visible and near-infrared on IPX-Clear Microlenses assisted by Grass-like Alumina

Fabrication Techniques in Picotechnology

Towards ultra-low detection limits of lithium by LIBS in LiF atomic layers

Reduced Lattice Thermal Conductivity in Thermoelectric α-MgAgSb via Sb₂Te₃ Powder Atomic Layer Deposition

Atomic-Layer-Deposition of Sn-Incorporated MoO₂ Films as an Interface Control Layer for High-Performances TiO₂-Based DRAM Capacitors

A Flexible HfO2 Nanofilm deposition on activated carbon fiber using atomic layer deposition method for Uric acid Detection