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Sunday Dose of ALD week 5, 2026. Read all ALD related scientific articles of Jan 26 - Feb 01.

Made possible by support from Beneq, Forge Nano, Atlant 3D, Swiss Cluster, Kurt J. Lesker, and Encapsulix!

 


Composition‐Controlled Cathode Protective Layer via Powder‐Atomic Layer Deposition for All‐Solid‐State Batteries 


Enhancing Oxide/Nitride Selectivity in Area-Selective Atomic Layer Deposition via Pyridine-Catalyzed Inhibition


First Demonstration of High-Performance Three-Tier IGZO Channels Gate-All-Around Thin-Film Transistors with Novel Metal Interlayer Contact


High-Performance Ultraviolet Photodetector Based on Si/Vertical Graphene/ZnO Heterostructure


Effect of Atomic Layer Deposition of Ultra‐Thin Oxide on Reactivity and Durability of Perovskite Oxygen Electrodes


[HTML] Atomic Layer Deposition of Ir Nanostructures on Carbon Papers for Alkaline Hydrogen Evolution: A Binder-free Electrode Approach


[PDF] FinFET technology: a comprehensive review on materials, structures, fabrication, and device performance


Powder Atomic Layer Deposition–Enabled Stable Perovskite Phosphors for UV‐Wavelength‐Discriminable Luminescent Films


Performance Enhancement of Ferroelectric Hafnium–Zirconium Oxide Tunnel Junctions by Nitrogen Incorporation


Wafer-scale high-κ HfO2 dielectric films with sub-5-Å equivalent oxide thickness for 2D MoS2 transistors


Cold plasma deposited thin-film nanocomposites for heterogeneous thermocatalysis–concepts and progress


Directional atomic layer etching of MgO-doped lithium niobate using Br-based plasma


Operando Magic Angle Spinning Solid‐State NMR Spectroscopy of Methanol Photoreforming Over Titania‐Coated Silica Monoliths


Synthesis of heteroleptic [Sr (ddemap)(tmhd)] 2 and its use in atomic layer deposition of low carbon SrO thin films


High-performance ionomer-free gas diffusion cathodes with low Pt loading for proton exchange membrane water electrolysis


Use of atmospheric pressure spatial vapor deposition to create spatially variant metal oxide semiconductor films for use in gas sensing arrays


Cobalt Precursor as Surface Inhibitor for Area-Selective Atomic Layer Deposition of Nanoscale Electronic Interconnects


Multilayered‐(NH4)2V7O16 Squares to Zinc Vanadate and w‐ZnO Nanoparticles via Zinc Metalation through Atomic Layer Deposition


Plasma-Enhanced ALD of HfOx for Effective Surface Passivation of Silicon: A Material and Interface Study


Cocktail Precursor Approach for Homogeneous ALD InGaO Film Growth Overcoming Limits of Mobility–Reliability Trade-Off in Oxide Semiconductors


Proximity Effects during GeTe Area-Selective Deposition by Atomic Layer Deposition: Nanopattern Induced Thickness Profile Alteration


[PDF] Thin-Film Transistors and Circuits from Solution Processing and ALD and Their Integration into Sensor Devices [Thesis]


Spatially Resolved Real-Time Monitoring of Plasma Processing Chamber using Quartz Crystal Microbalance


A New Horizon for the Fabrication of Nitrogen-Polar Gallium Nitride High Electron Mobility Transistors


[HTML] Design and Evaluation of a Laboratory-Scale Thermal ALD System: Case Study of ZnO


[PDF] A Review of Recent Advances in Nano-Electronics for High Performance Sensing Materials, Architectures, and Future Directions


Influence and Mechanism of Pressure on the Etching Precision of Polymer Nanostructured Surfaces


Controlled Cross‐Linking for Water Developable Hf‐Based Dry Resist Prepared via Molecular Layer Deposition


Isotropic Thermal Atomic Layer Etching of 2D MoS2 Using Formic Acid Vapor


Engineering Metastability in Atomic Layer Deposition: Polymorph and Valence Control


Monolithic integration of graphene and lithium niobate layer grown by atomic layer deposition for uncooled infrared photodetectors


High-performance annealing-free InGaZnOx thin film transistors by thermal ALD


 

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