Sunday Dose of ALD week 20, 2024. Read all ALD related scientific articles of May 13 - 19

Investigation on self-rectifying properties of Pt/HfO2/Ti with rivet-like structure based on ALD conformal technology

Atomic layer etching in HBr/He/Ar/O2 plasmas

Significant Lifetime Improvement of Negative Bias Thermal Instability by Plasma Enhanced Atomic Layer Deposition SiN in Stress Memorization Technique

Exploring TMA and H2O Flow Rate Effects on Al2O3 Thin Film Deposition by Thermal ALD: Insights from Zero-Dimensional Modeling

Non-centrosymmetric crystallization in ferroelectric hafnium zirconium oxide via photon-assisted defect modulation

Aluminum-doped zinc oxide thickness controllable wavelengths in visible light and high responsivity devices using interrupted flow atomic layer deposition

Attaining quantitatively fewer defects in close-packed InGaZnO synthesized using atomic layer deposition

Area Selective Deposition for Bottom-up Atomic-Scale Manufacturing

Surface chemistry in atomic layer deposition of AlN thin films from Al (CH3) 3 and NH3 studied by mass spectrometry

Conformality of atomic layer deposition analysed via experiments and modelling: case study of zinc oxide for catalytic applications

Atomic layer etching of SiO using sequential exposures of Al(CH) and H/SF plasma

Dataset in support of the paper'Zinc oxide nanostructure deposition into sub-5 nm vertical mesopores in silica hard templates by atomic layer deposition'

Deciphering the stability mechanism of Pt-Ni/Al2O3 catalysts in syngas production via DRM

Operation of Amorphous TiO2 Protected Photocathodes Described with the Maxwell Equivalent Circuit

Amidoxime-Containing Zr and Hf Precursors for Thin Film Deposition

Advanced self-cleaning and antimicrobial organic-inorganic hybrid textiles achieved through vapor phase infiltration (VPI)

Inorganic layered polymeric membranes: Highly-ordered porous ceramics for surface engineering of polymeric membranes

Atomic layer deposition of high-k and metal thin films for high-performance DRAM capacitors: a brief review

Continuous Lithium‐Ion Extraction From Seawater and Mine Water With a Fuel Cell System and Ceramic Membranes

Exploring the Potential of InCp Precursor in Plasma-Enhanced Atomic Layer Deposition for High-Performance IZO-TFTs



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