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By Agnieszka Gozdek / May 10, 2026

Sunday Dose of ALD week 19, 2026. Read all ALD related scientific articles of May 04 - 10.

Made possible by support from Beneq, Forge Nano, Atlant 3D, Swiss Cluster, Kurt J. Lesker, and Encapsulix!

Red Phosphorus by Atomic Layer Deposition

[HTML] CeOx enhanced electrochemical performance of LiNi0. 80Mn0. 1Co0. 1O2 cathode active material for Li-ion batteries

Effects of oxidant selection for atomic layer deposition on impurity removal and crystallinity of as-grown Hf1− xZrxO2 thin films

Coordination-Driven Ambient Infiltration of Silicon and Germanium Precursors for the Synthesis of Polymer–Inorganic Hybrid Materials

Anti-Markovnikov Hydrosilylation Catalyzed by Single Atomic Platinum on γ-Al2O3

[HTML] Impact of post-deposition annealing on the interface and electrical properties of ALD-deposited SiO2 and HfO2/SiO2 gate stacks on 4H-SiC MOS devices

Rational design of p-ZnO/TiO2/Ag2S core-shell nanowire arrays for enhanced piezo-photocatalytic performance

Atomic Layer Etching of Titanium Nitride With O₃ and NbCl₅

Cover Feature: Immobilization of Titanium Dioxide Ultrathin Films onto Porous Membranes via Atomic Layer Deposition for Photodegradation of Water‐Borne Pollutants

High-Stability N-Doped IHZO Thin Film Transistors Fabricated via All-Thermal Atomic Layer Deposition

Film and surface stress during Al2O3 thermal atomic layer etching using in situ wafer curvature measurements

Plasma‐Sequence‐Engineered Atomic Layer Deposition of Ultra‐Thin SiN_x for Enhanced Etching Resistance in Extreme Ultraviolet Pellicles

Templated Oxide Synthesis on Self-Assembled PS-b-PMMA via Atomic Layer Deposition

Mitigating Electrochemical Degradation in CsPbBr₃ Gamma Detectors by Organic and Inorganic Encapsulation

All-Dry Molecular Scale Processing for Shaping Open Pockets with CO₂ Affinity in a Covalent Organic Framework

Probing Interfacial Reaction Pathways in Atomic Layer Deposition on Sulfide Superionic Conductors

Non-volatile memory with improved retention by employing multi-layered HfO2 nanocrystal charge-trap layer deposited by atomic layer deposition

Direct observation of half-cycle adsorption of aminosilane precursors by in situ XPS

Integrated feature-scale simulation framework for atomic layer deposition incorporating transient transport and kinetics

[HTML] Designing an agentic AI workflow for structured information extraction from scientific text: A case study on atomic layer deposition of ZnO and IGZO

Mechanical Scratch Activation of ALD-Grown SnO2 Thin Films Enabling Ultralow-Noise NO2 Gas Sensing

Composition-driven spinel crystallinity engineering for high-performance magnesium indium oxide TFTs via thermal atomic layer deposition

Inorganic‐Organic Synergistic Passivation via Grain Boundary‐Selective ALD‐Al₂O₃ and Piperazine‐1,4‐diium Iodide for Efficient Wide‐Bandgap Perovskite Solar Cells

Plasma-Enhanced Atomic Layer Deposition Synthesis of Nanolayered Molybdenum Diselenide (MoSe₂) Thin Films for Nanoelectronics

[HTML] Enhancing ignition and thermal oxidation performances of boron powder via tungsten surface activation layers fabricated by atomic layer deposition

Self–Activating atomic layer deposition: A kinetic strategy for growth of metastable, high work function MoO2 thin films

Microscale bending plasticity and fracture behavior of amorphous aluminum oxide films

Low temperature growth of high-quality Ga2O3 films on MgO substrate via atomic layer deposition