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By Agnieszka Gozdek / May 03, 2026

Sunday Dose of ALD week 18, 2026. Read all ALD related scientific articles of April 27 - May 03.

Made possible by support from Beneq, Forge Nano, Atlant 3D, Swiss Cluster, Kurt J. Lesker, and Encapsulix!

Atomic-layer deposited mid-infrared sensitive NbTiN superconducting nanowire single photon detectors

Low-Temperature Atomic Layer Deposition of Gallium Nitride Using Tris (dimethylamido) gallium with a Coherent Nucleation on GaN (0001)

Tailoring crystallinity in Al2O3 dielectric films via PEALD and sputtering: Implications for thermal budget and device integration

Atomic Layer Deposition and Doping Strategies for High-Performance Arsenic-Free Ovonic Threshold Switch Devices

Thermal atomic layer deposition of SiNx protective coatings for hydrogen plasma-resistant carbon nanotube pellicles

Atomistic Modeling and Machine Learning Interatomic Potentials for Semiconductor Deposition and Etching Process Simulations

ZnO and AlZnO_x freestanding cantilevers toward the detection of volatile organic compounds with high selectivity and sensitivity

A CFD-Based Digital Twin Framework for Transient Molybdenum Pentachloride Transport in an Experimental Atomic Layer Deposition Process

[HTML] An Overview of the Application of Modern Statistical Techniques in Semiconductor Manufacturing

Vapor phase deposition of alumina on interior surfaces of tritium storage containers

In situ XPS investigation of β-Ga2O3 surface chemistry for the development of SF6/Ar based plasma atomic layer etching processes

Vapor Phase Infiltration Modulating Microwave Absorption of Conductive Polymers: Frequency Tunability and Polarization Enhancement

Al2O3-coated MoO3 photocathodes enabling high-performance near-neutral Zn-air batteries

[HTML] Selected Deposition Techniques and the Effect of Doping on the Properties of Thin ZnO Films: A Literature Review

Study of Ferroelectric and Field-Induced Ferroelectric Phase Formations in Atomic-Layer-Deposited ZrO2 Thin Films with TiN Electrodes

Study of Electrical and Structural Properties of SrTiO3 Film Grown by Atomic Layer Deposition with GeO2 Interfacial Layer

Study on the Structural and Electrical Modulation of ALD-Grown Rutile TiO₂-Based Thin Films by Y₂O₃ Insertion for DRAM Capacitor Applications

Atomic Layer Deposition of Metallic Molybdenum Dioxide Thin Films Enabling High‐k Rutile Capacitors

Amphiphilic molecular binder strengthens atomic layer-deposited SnOx for reliable perovskite solar cells

Tuning the optoelectronic properties of NiOx thin films by atomic layer deposition with a precise incorporation of aluminum atoms

Electrochemical Design of Atomically Conformal Ga₂O₃ Buffer Layers via Cu₂O‐Catalyzed Nitrate Reduction Reaction for Efficient Cu₂O Photocathodes

In vacuo XPS study: controlled ALD growth of Al 2 O 3 on metallic lithium enabled by plasma pretreatment

Self-aligned patterning by area-selective etching of polymers and area-selective atomic layer deposition: Decreasing polymer flow and activating noncatalytic surface

Balancing ferroelectricity and endurance in Hf0. 5Zr0. 5O2 thin films through mixed-oxygen atomic layer deposition

Atomic Layer Etching of Nickel Using N₂/H₂ Plasma Exposure and Hexafluoroacetylacetone

[HTML] Atomic Layer Deposition of Al2O3 Using Alcohol as Oxygen Source

Decoupled regulation of kinetics and intrinsic activity via atomic layer deposition-guided spinel reconstruction of cobalt phosphate aerogels for oxygen evolution