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By Agnieszka Gozdek / March 22, 2026

Sunday Dose of ALD week 12, 2026. Read all ALD related scientific articles of March 16 - 22.

Made possible by support from Beneq, Forge Nano, Atlant 3D, Swiss Cluster, Kurt J. Lesker, and Encapsulix!

Advances in area-selective atomic layer deposition: surface chemistry, challenges, and future perspectives

Minimum Effective Thickness of Cathode Protective Layers for Sulfide-Based All-Solid-State Batteries via Powder-Atomic Layer Deposition

[HTML] 3D-printed multiphasic biocomposite architectures for load-bearing medical implants

Investigation of metronidazole binding to TiO2 coated PMMA surface for dental applications

[HTML] First-principles mechanism of TDMAH adsorption on pristine and laser-functionalized graphene toward area-selective atomic layer deposition of HfO2

Structural Modification of Monolayer Graphene Induced by Atomic Layer Deposition of Al2O3 Dielectric

[HTML] A gas sensor based on the hyperbolic mode resonance by integrating hafnium dioxide thin-film in an optical structure

Impact of excess oxygen on electrical characteristics and bias stability in PEALD ultrathin InOx FETs

Ultrathin CuO Hole-Selective Contact for Efficient GaAs Solar Cells

Li-based NbOx Self-Rectifying Memristor Crossbar Arrays for Precisely Reversible Weight Programming

Impacts of the top antireflection films on the performance of blue micro-LEDs

AI-driven Inverse Design of Complex Oxide Thin Films for Semiconductor Devices

Density functional theory study of oxygen adatom on graphene for surface pretreatment in atomic layer deposition

Sequential-temperature atomic layer deposition strategy resolves passivation-densification dilemma in CsPbBr3 perovskite quantum dots

Crystal-Phase Dependence of Solar-Blind UV Photodetector Performance: A Comparison of ε-, β-, and ε/β-Mixed Ga₂O₃

Atomic Layer Deposition in Transistors and Monolithic 3D Integration

Micro-/nanothick coatings in micro-/nanofabrication [Chapter]

A review of plasma-induced damage and interface recovery in GaN-based materials etching processes

Atomic Layer Deposition of Metal Halide Perovskites: Chemistry, Growth Mechanisms, and Emerging Prospects

Atomic layer deposition in proton exchange membrane fuel cells: precision control from catalysts to membrane electrode assemblies

[HTML] Improvement of wide-bandgap Cu (In, Ga) Se2 solar cells by Cd-free ZnSnO buffer layers deposited via atomic layer deposition

Bias-modulated atomic layer deposition of zinc oxide: Insights into precursor-surface interactions for zinc oxide films

Nanoscale Precision in Membrane Design: A Mini Review on Atomic Layer Deposition for Functional Modifications

Overcoming the resistivity-roughness trade-off in 3D DRAM interconnects via nucleation-modulated atomic layer deposition

Reconfigurable oxide-fluoride thin-film platform via ALD for UV and broadband optical applications

Role of Rare‐Earth Lanthanum Doping on Electrical Performance and Stability of Atomic Layer Deposition Processed Indium Oxide Thin‐Film Transistors

Composition-controlled hafnium-based inorganic/organic hybrid dry photoresist via discrete feeding-molecular layer deposition

Organic–Inorganic Hybrid Alucone Membrane on SnO2 Nanowires for Selective H2S Gas Sensing

Top-down vapor-phase infiltration of natural stibnite to produce confined Sb₂S₃/C nanocomposites as anodes for superior cycling Li-ion battery

Effect of Oxide Chemistry on Pt Redistribution and Site Exposure in ALD-Coated Catalysts

High Throughput Screening of Alucone and Zincone Extreme Ultraviolet Photoresists through Molecular Layer Deposition

Interface-engineered top-gate indium-tin-oxide thin-film transistors with 2-nm channels

Carbon Nanotube Surface Engineering Through Supercritical CO₂ Pretreatment for High-Quality Gate Dielectric Deposition

Atomic Layer Deposited Cu Incorporation Enables Enhanced Thermoelectric Performance in n‐Type Mg₃(Sb, Bi)₂