Sunday Dose of ALD week 11, 2024. Read all ALD related scientific articles of Mar 11 - 17

Scientific articles related to ALD/MLD/ALE/VPI        

 March 11 - 17, 2024


Unfolding an Elusive Area-Selective Deposition Process: Atomic Layer Deposition of TiO2 and TiON on SiN vs SiO2

Hole-Selective Hybrid TiO2 Layer towards Long-Term Stability of Low-Cost Photoanodes in Solar Water Oxidation

Study of Mid-Pressure Ar Radiofrequency Plasma Used in Plasma-Enhanced Atomic Layer Deposition of α-Al2O3

High-Performance Sulfide All-Solid-State Batteries Enabled by High-Voltage Ni-Rich Cathode with a Conformal and Conductive Protective Layer

Unveiling Interface and Bulk Defects Beyond Stability Limits in ALD-IGZO FETs for Emerging Semiconductor Applications Dong-Gyu Kim

Study on Impact of Plasma-Enhanced-Atomic-Layer-Deposition derived High-k Dielectrics on Performance and Reliability of Oxide Thin-Film Transistors

Effective medium metasurfaces using nanoimprinting of the refractive index: design, performance, and predictive tolerance analysis

Achieving High Efficiency and Enhanced Thermal Stability in Germanium-Encapsulated Tin–Lead Perovskite Solar Cells

… , Mechanical Properties and Cellular Studies of Fiber-Reinforced Composites Modified by Depositing SiO2 Nanofilms on Quartz Fibers via Atomic Layer Deposition

Reducing the Thermal Effects during Coating of Superconducting Radio-Frequency Cavities: A Case Study for Atomic Layer Deposition of Alumina with a Combined …

Unfolding an Elusive Area-Selective Deposition Process: Atomic Layer Deposition of TiO2 and TiON on SiN vs SiO2

Effect of Al2O3 coating thickness on the thermal stability of Cu–carbon nanotube hybrids

Highly Reproducible and CMOS-compatible VO2-based Oscillators for Brain-inspired Computing

Ultrasensitive detection of miRNA based on single-walled carbon nanotube@ MoS2 field-effect transistor regulated by atomic layer deposition

Nucleation of highly uniform AlN thin films by high volume batch ALD on 200 mm platform

Crystal Structure and Surface Morphology of GaN Thin Films Grown on Different Patterned AlN Substrate Surfaces

Characterization of MoO3 and TixMoyOz Thin Films Prepared by Atomic Layer Deposition

Scalable Large-Area 2D-MoS2/Silicon-Nanowire Heterostructures for Enhancing Energy Storage Applications

Highly conductive and flexible transparent hybrid superlattices with gas-barrier properties: Implications in optoelectronics

Solid and Polymer-Based Electrolyte Materials and Processing Methods Suitable for Three-Dimensional Battery Architectures

Atomic vs. sub-atomic layer deposition: impact of growth rate on the optical and structural properties of MoS2 and WS2

Switchable reciprocal metasurfaces for infrared scene projection

InGaN-based Micro-LEDs: enhancing efficiency and speed for next-generation visible light communication applications

Efficient Photothermal Catalytic Oxidation Enabled by Three-Dimensional Nanochannel Substrates

Reducing contact resistance of MoS2-based field effect transistors through uniform interlayer insertion via atomic layer deposition

Area-selective atomic layer deposition on 2D monolayer lateral superlattices

Mechatronic Spatial Atomic Layer Deposition for Closed‐Loop and Customizable Process Control

Conformal High-Aspect-Ratio Solid Electrolyte Thin Films for Li-Ion Batteries by Atomic Layer Deposition

Toward deeper ultraviolet detection: Atomic layer deposited amorphous AlGaOx thin film detector with its tunable optical properties and opto-electronic responses

Design and Synthesis of Transferrable Macro‐Sized Continuous Free‐Standing Metal‐Organic Framework Films for Biosensor Device


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