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By Agnieszka Gozdek / March 08, 2026

Sunday Dose of ALD week 10, 2026. Read all ALD related scientific articles of March 02 - 08.

Made possible by support from Beneq, Forge Nano, Atlant 3D, Swiss Cluster, Kurt J. Lesker, and Encapsulix!

[HTML] Deposition Characteristics of SiN Thin Film Deposited by Applying the Chucking Function in a Mono Polar ESC Heater

Antibacterial glass bead filters via atomic layer deposition of vanadium-doped TiO2 for enhanced water purification

Band Alignment of Wide-bandgap BeO Epitaxially grown on α-Ga2O3

Improving the cycling stability of nano single-crystal lithium-rich cathodes through high-energy interface passivation enabled by an ultrathin TiO2 layer

PEALD-derived ultrathin Al2O3 and MgO interphases on freestanding nitrogen-doped carbon nanofibers for robust potassium-ion battery anodes

Amorphous InHfZnO/Ga2O3 heterojunction by plasmaenhanced atomic layer deposition for transparent photoelectric synaptic devices with temperature-tunable mechanism analysis

[HTML] Recent progress of single-atom catalysts (SACs) for the advanced oxidation of organic compounds: A comprehensive review on metal-specific performance and and mechanisms

Stabilizing SrVO₃ Bottom Electrodes for High k SrTiO₃ Integration via La Doped STO Passivation and O₃ Reduced Atomic Layer Deposition

Fluorocarbon (C4F8) assisted plasma-enhanced atomic layer etching (PEALE) of SiO2 with high repeatability of cycles in industrial ICP reactor. I. experiment

Fluorocarbon (C4F8) assisted plasma-enhanced atomic layer etching of SiO2 with high repeatability of cycles in industrial ICP reactor. II. Simulation

From Copper Nanoparticles to Alumina Encapsulated Porous Layers With Enhanced Mechanical Stability

Atomic-Layer-Engineered Rh/In₂O₃/NiO Heterostructures for Efficient NO2 Sensing

Effective medium approximation for the refractive index of stratified metal oxide composites synthesized by atomic layer deposition

Hafnium oxide interface stabilization for efficient, photothermally stable perovskite solar cells

Quantification of the Synergetic Contribution of a Buried WO3/TiO2 Heterojunction to Photocatalytic Activity

Evaluation of Advanced Catalysts for Green Methanol Synthesis

Unravelling Nucleation in Pt Atomic Layer Deposition using Grazing Incidence X-ray Total Scattering, Grazing Incidence Small-Angle X-ray Scattering, and X-ray …

Phase transformation in ALD grown 2D-MoS2 by ultrashort laser pulses

Temperature dependence of the growth per cycle during molecular layer deposition of polyurea on plasma deposited SiO2

Multiscale modeling of gallium nitride atomic layer etching in chlorinated plasmas: A combined dynamic global model, ab initio, and kinetic Monte Carlo approach

Annealing effect on the Si-Ga2O3 thin films by PEALD for various applications with mechanism analysis

Atomic layer deposition of zinc oxide films on lateral high-aspect-ratio test structures using diethylzinc and water as precursors

Aromatic organic-tin hybrid films as electron beam resists

Synergistic enhancement of dry tribological performance of cemented carbide by laser texturing and atomic layer deposited TiO2 coating