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Sunday Dose of ALD week 1, 2026. Read all ALD related scientific articles of Dec 29 - Jan 04.

Made possible by support from Beneq, Forge Nano, Atlant 3D, Swiss Cluster, Kurt J. Lesker, and Encapsulix!

 


Atomic Layer Etching in Patterning Materials: Anisotropy, Selectivity, Specificity and Sustainability


Deposition of Molybdenum Oxide Thin Films on Silicon Substrates for High-Performance Transparent Electronics


Indirect Synthesis of Carbon-Free Perovskite SrTiO3 Thin Films via SrF2 and TiO2 ALD for DRAM Capacitors


Growth Mechanism and High Anti-Reflective Coating Application of PEALD-Lif Films Under Various Plasma Powers


Thin-film interlayer architectures for superior all-solid-state battery performance


[HTML] Metal-oxide nanolaminate barrier coatings to enable large-scale manufacturing of sustainable flex packaging


Unveiling the structural and electrochemical effects of Al 2 O 3 incorporation within LiPON electrolyte thin films by atomic layer deposition


Gold (I) alkoxide and thiolate complexes as potential atomic layer deposition precursors


Research Status of Flexible High Barrier Film Materials


Evolution pathways and control strategies of hydrogen defects in ALD ZnO


ALD Reactivity‐Driven 2DEG‐Like Interfacial Conduction in Nanolaminate InGaZnO Transistors toward High‐Mobility and Stable Oxide Electronics


Uniform lanthanum oxide atomic layer deposition using ozone


[HTML] Atomic-Layer-Grown Pt on Textile Boosts Adsorption and Sensitivity of MXene Gel Inks for Wearable Electronics


Growth Characteristics and Electrical Properties of Atomic-Layer-Deposited ZrO2 on Several Substrates using Novel Zr Precursors


Inherently area-selective atomic layer deposition for the fabrication of 2D and 3D nanostructures


[HTML] Photocatalytic 3D ZnO Nanostructures Prepared by Atomic Layer Deposition from a Sacrificial Cellulose Template


Transformative Core–Shell Nanoengineering of ZnO Varistors: Atomic-Scale Barrier Design and Computational Processing


Normally-off Al/HfO2/Al-gated diamond field effect transistor on a heteroepitaxial diamond substrate


[PDF] Effect of ALD passivation layer on the corrosion and mechanical properties of PVD-based hard coatings


A scanning probe microscopy approach for identifying defects in aluminum oxide


[HTML] Atomic Layer Deposition of Oxide-Based Nanocoatings for Regulation of AZ31 Alloy Biocorrosion in Ringer's Solution


Interface bond forming-breaking contact induced moderate NiO-Al2O3 interaction for enhanced oxidative dehydrogenation of ethane


A Review on Performance Improvement of Solid Oxide Cells via Atomic Layer Deposition


Area-Selective Atomic Layer Deposition of Ruthenium on SiO2/W Patterns Using Silicon-Based Inhibitors


Field Emission from ZnO Nanowires with Atomic Layer Deposition Coated In2O3 Thin Films


Plasma-enhanced atomic layer deposition of MgO thin films with superior fluorine plasma resistance for semiconductor equipment applications


[HTML] Ultraviolet shielding with tunable optical transparency using non-periodic TiO2–ZnO multilayers


Enhanced ALD-SnO2 via Reactive Ion Etching-Assisted Surface Engineering for High-Performance and Stable Perovskite Solar Cells


Different Growth Modes of Si Doped Ga2O3 Films on Sapphire Substrates via Atomic Layer Deposition


[HTML] Plasma-Enhanced Atomic Layer Deposition of AlF3 Antireflective Coatings via Pulse-Time Control of Fluorine Radical Reactions


if you made it this far, congratulations and Happy 2026 from the ALD Cat!

Sunday Dose of ALD week 1, 2026. Read all ALD related scientific articles of Dec 29 - Jan 04.

 

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