Meaglow's hollow cathode plasma sources are the go to solution for reducing oxygen contamination in non-oxide films (see the recent paper in Coatings). These units provide a high density plasma source without the oxygen contamination from the plasma etching of quartz or sapphire liners. The series 50 plasma source is our most commonly sold unit, it has an NW-50 vacuum connection and a ¼" VCR gas connection, and can operate with up to 600 watts of RF power. The standard units are of stainless steel construction with a stainless steel hollow cathode, however customization is available.  For instance, a nickel alloy version is available for operation with fluorine and chlorine based gases. Other cathode materials are available upon request. We can supply a Seren RF generator and RF match with the plasma source, though operation with other equipment is possible.

• 300 or 600 watt RF operation, DC possible.
• 316 stainless steel cathode standard, other materials on request, a nickel version is available for use with chlorine and fluorine based gases.
• Standard operating pressure of ~ 100 mTorr to > 5 Torr. A low pressure option is available down ~20 mTorr dependent on gas type.
• An integrated matching box can be added.
• Wide range of gas usage, nitrogen, ammonia, hydrogen, argon, many others.