KEMSTREAM's Vapbox DLI (Direct Liquid Injection) vaporizers are high performances on-demand vapor generation systems. They can handle and vaporize a very wide range of ALD precursors and ALE (Atomic Layer Etching) reactants including thermally instable molecules. Vapbox can operate from atmospheric pressure to vacuum. They can deliver stable and reproducible vapor flows. The unique proprietary injection-atomization implemented on Vapbox DLI vaporizers achieve flash vaporization allowing to get a very fast response time of the vaporizer that allows saving precursor. The nominal vapor flow is reached in very short time.

1. Co-injection of carrier gas and liquid/solution

2. Fast response time vaporizers

3. Able to operate up to 250 or 300°C (model dependent)

4. Can operate at atmospheric pressure or under vacuum

5. Can handle pure liquid chemicals or solutions in an organic solvent of solid chemicals 

6. Can handle a very wide range of chemicals