Process diagnostics for atomic layer deposition of TaN-based layers

Author
Daniela Seiffert
Year
2012
Language of the thesis
German
Thesis name in original language
Prozessdiagnostik an der Atomlagenabscheidung von auf TaN-basierenden Schichten
Abstract & Cover
Source of Information
Martin Knaut
University
Technische Universität Dresden
(Dresden, Germany)
Other notes
(translation of title into English from Martin Knaut)
LinkedIn
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