A study on TiAlO films deposited by plasma enhanced atomic layer deposition

Author
Dae-Kwon Joo
Year
2009
Language of the thesis
Korean
Thesis name in original language
Ir 하부전극 위에서 PEALD로 증착 된 TiAlO 박막의 특성에 대한 연구
Abstract & Cover
Source of Information
Korea Advnaced Institute of Science and Technology (KAIST)
University
Korea Advanced Institute of Science and Technology
(Daejeon, Republic of Korea)
External Link
LinkedIn
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