A study on the Al2O3 thin film deposition by ALD and PEALD

Author
Woo-Seok Jeon
Year
2003
Language of the thesis
Korean
Thesis name in original language
ALD와 PEALD를 이용한 Al2O3 박막 증착에 관한 연구
Abstract & Cover
Source of Information
Korea Advnaced Institute of Science and Technology (KAIST)
University
Korea Advanced Institute of Science and Technology
(Daejeon, Republic of Korea)
External Link
LinkedIn
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