Manufacturer
Beneq
Product model
P800
Type of product
Batch Production ALD system
Description

The Beneq P800 is specifically designed to coat big parts of complex shapes or large batches of smaller parts. Our customers use the P800 for optical coatings, anticorrosive coatings of semiconductor equipment parts, and various applications where ALD is used on glass or metal sheets. Perfect for industrial manufacturing. Boasting a vacuum chamber with a diameter of 800 mm, this tool provides ample space for high volume coating production while still providing excellent batch uniformity. It is ideal for depositing thick optical coatings and etch-resistant barrier films.

Additional content

  • Brochure of the P800 can be found here.
  • Additional videos about the P800 can be found here and here.
Technical features

Specifications:

Process Type

Thermal ALD

Integration

Stand-alone

Dimensions

3200×1340×2460 mm

Vacuum Chamber Dimensions

Ø: 800 mm

Temperature Range

25–550 °C

Substrate Type

Wafers Glass or metal sheets 

3D and freeform parts

Substrate Space Example

550 × 310 × 700 mm 

730 × 1200 x 10 mm

Product Links
Beneq P800 Video
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