Product model
Genesis ALD
Type of product
Vacuum spatial roll to roll ALD system

The Genesis ALD is ideal for coating any roll-format substrates, and for multiple functional applications.

  • Passivation of cathodes and anodes for various types of lithium-ion and solid-state batteries
  • Conductive layers and encapsulation for flexible solar cells
  • Moisture barriers for flexible electronics

Additional content

  • Brochure of the Genesis ALD can be found here.
  • Additional video about the Genesis ALD can be found here.
  • Learn more about the science of spatial ALD here.
Technical features


Machine Speed

0.1 – 10 mpm

Web Tension

10 – 200 N

Incoming Reel

100 – 420 mm Web Width

300 mm Diameter Maximum

152 mm Core ID

Interleave winders: Yes
150 mm Interleave diameter maximum

ALD Materials

Al2O3, TiO2, ZnO, ZnS, SiO2 and more

Maximum Temperature

250 oC

Product Links
Beneq Genesis ALD manufacturer page
Beneq Genesis ALD Video
linkedin invite