Sunday Dose of ALD week 4, 2024. Read all ALD related scientific articles of Jan 22 - 28

Scientific articles related to ALD/MLD/ALE/VPI        

 January 22 - 28, 2024


[HTML] Multiscale computational fluid dynamics modeling of an area-selective atomic layer deposition process using a discrete feed method

 Device Feasibility of 60-nm-Scaled Vertical-Channel Memory Transistors Using InGaZnO Channel and ZnO Charge-Trap Layers

High Threshold Voltage Stability Enhancement-Mode GaN p-FETs Fabricated with PEALD-AlN Gate Interfacial Layer

Reactive Force Field Molecular Dynamics Studies of the Initial Growth of Boron Nitride Using BCl3 and NH3 by Atomic Layer Deposition

Where Atomically Precise Catalysts, Optoelectronic Devices, and Quantum Information Technology Intersect: Atomic Layer Deposition

Controllable Ion Design in Flexible Metal Organic Framework Film for Performance Regulation of Electrochemical Biosensing

[HTML] Mitigating the Environmental Impact by Synthesis of Adsorbents from Aluminium-Containing Waste

c-Axis Aligned 3 nm Thick In2O3 Crystal Using New Liquid DBADMIn Precursor for Highly Scaled FET Beyond the Mobility–Stability Trade-off

Dependence of the Metal–Insulator–Semiconductor Schottky Barrier Height on Insulator Composition

Building Semipermeable Films One Monomer at a Time: Structural Advantages via Molecular Layer Deposition vs Interfacial Polymerization

Integrating run-to-run control with feedback control for a spatial atomic layer etching reactor

Development of Schottky barrier field-effect transistors (SB-MOSFET) with ultra-low thermal budget

A Novel Monolithic MEMS Array for E-Nose Applications

Plasma-enhanced atomic layer deposition of aluminum nitride: characteristics and applications

Lowering of interface state density between deposited gate oxide and SiC substrate via controlling substrate oxidation

A Nuclear Magnetic Resonance Approach Towards Understanding Surface Modification and its Influence on Ni-rich Layered Oxides in Li-ion Batteries

Low global warming C5F10O isomers for plasma atomic layer etching and reactive ion etching of SiO2 and Si3N4

Graphene/Al2O3/Si Schottky diode with integrated waveguide on a silicon-on-insulator wafer

Investigation of intermediates formation in the CO2 hydrogenation to methanol reaction over Ni5Ga3-ZrO2-SBA-15 materials prepared via ZrO2 atomic layer deposition

[HTML] Synergistic effect of Pd single atoms and nanoparticles deposited on carbon supports by ALD boosts alkaline hydrogen evolution reaction

Improving AlGaInP Micro-LEDs Characteristics via Varied Dielectric Passivation Layers

Interdiffusion suppression at the cathode‐electrolyte interface of all‐solid‐state‐batteries by Li3PO4 conformal coating

Development of Cobalt-Free Cathodes for Lithium-Ion Batteries

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