News of 31 December 2022
New peer reviewed articles related to ALD/MLD/ALE/VPI
Relationship between resistive switching and Mott transition in atomic layer deposition prepared La2Ti2O7-x thin film.
Atomic layer deposition of Al2O3 thin films for corrosion protections of additive manufactured and wrought stainless steels 316L.
Area-Selective Atomic Layer Deposition of High-Quality Ru Thin Films by Chemo-Selective Adsorption of Short Alkylating Agents.