A Study on the Dielectric TiO2 Films for Fabrication of 3-D Structural Capacitor and Promising Electrodes for Next-generation DRAM Capacitor

Author
Cheol Jin Cho
Year
2019
Abstract & Cover
Source of Information
Cheol Seong Hwang
University
Seoul National University
(Seoul, Korea)
Other notes
http://dcollection.snu.ac.kr/common/orgView/000000154523
External Link
linkedin invite