Product model
Vellum series
Type of product
R&D and production spatial ALD tool for large flat substrates

Vellum is tailored designed for sheet to sheet (S2S) applications for deposition on substrates ranging from 0,5 x 0,5m up to 1 x 1.5 m. 

Substrates like metal or polymer foils, wafers, glass and porous substrates. All aimed at real production throughput up to 20 substrates per minute. In combination with a large variety of deposition materials and deposition temperatures. 
The substrate flow handling and inline integrated set-up of the system will be in designed as the overall set-up requires.

The Vellum product line is a fully automatic processing platform for high throughput.

Technical features

Substrate types

  • flat substrates like polymer and metal foils, wafers, glass and porous substrates

Substrate size 

  • 0,5x0,5 to 1,0x1,5m


  • Both thermal as plasma enhanced s-ALD

Related Content

  • Learn more about the science of atmospheric spatial ALD here.
Product Links
SparkNano Vellum series manufacturer page
SparkNano Vellum series Video
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