Vellum is tailored designed for sheet to sheet (S2S) applications for deposition on substrates ranging from 0,5 x 0,5m up to 1 x 1.5 m. 

Substrates like metal or polymer foils, wafers, glass and porous substrates. All aimed at real production throughput up to 20 substrates per minute. In combination with a large variety of deposition materials and deposition temperatures. 
 
The substrate flow handling and inline integrated set-up of the system will be in designed as the overall set-up requires.

The Vellum product line is a fully automatic processing platform for high throughput.

Substrate types

• flat substrates like polymer and metal foils, wafers, glass and porous substrates

Substrate size 

• 0,5x0,5 to 1,0x1,5m

Process

• Both thermal as plasma enhanced s-ALD

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