- Product model
- Vellum series
- Type of product
- R&D and production spatial ALD tool for large flat substrates
Vellum is tailored designed for sheet to sheet (S2S) applications for deposition on substrates ranging from 0,5 x 0,5m up to 1 x 1.5 m.
Substrates like metal or polymer foils, wafers, glass and porous substrates. All aimed at real production throughput up to 20 substrates per minute. In combination with a large variety of deposition materials and deposition temperatures.
The substrate flow handling and inline integrated set-up of the system will be in designed as the overall set-up requires.
The Vellum product line is a fully automatic processing platform for high throughput.
- Technical features
- flat substrates like polymer and metal foils, wafers, glass and porous substrates
- 0,5x0,5 to 1,0x1,5m
- Both thermal as plasma enhanced s-ALD
- Learn more about the science of atmospheric spatial ALD here.
- Product Links
SparkNano Vellum series manufacturer pageSparkNano Vellum series Video