The optimized design enables ultrafast deposition onto flexible substrates, such as polymer or metal foils.  

The system can be configured for thermal or plasma enhanced Spatial ALD to match the desired material to be deposited.  The web width, web speed and deposition materials will be ready to be adopted according to the overall customer application. The standard web-with is ranging from 300 to 2000 mm and a web speed up to 60 m/min. 

SparkNano uses proven technology used for other high throughput energy applications. Additionally,  optional integrational designs for line integration are offered. 

Substrate types

• Polymer or metal foils

Substrate size

• A foil width of 300 mm upto 2000 mm. 
• The maximum foil thickness depends on the material properties in combination with the minimal and maximal web tension and drum diameter

Process

• Both thermal as plasma enhanced s-ALD

Related Content

• Learn more about the science of atmospheric spatial ALD here.