Atomic Layer Deposition
ALD PRODUCTS
ALD Systems
- Manufacturer
- SparkNano
- Product model
- Labline Series 6" and 12"
- Type of product
- R&D Spatial ALD Tool
- Description
The LabLine series are designed for versatility and flexibility and are especially suited for process development and pilot-line production. Through its unique design, it is possible to accommodate a wide variety of types and sizes of substrates and different materials. The LabLine series is available in two sizes; for maximum 6 inch and for maximum 12 inch substrates . The LabLine series combines the highest quality Spatial ALD film depositions together with the flexibility of the system to fit future needs and applications.
Learn more about the science of atmospheric spatial ALD here.
- Technical features
LabLine 6"
LabLine 12"
Technical features- flat substrates like polymer and metal foils, wafers, glass and porous flat substrates
Substrate size- A free envelope of 175 mm x 215 mm x 5 mm is available. In this volume any flat substrate can be placed with a substrate specific holder
Process
- Both thermal and plasma enhanced s-ALD
Technical features- Substrate types flat substrates like polymer and metal foils, wafers, glass and porous substrates
Substrate size
- A free envelope of 320 mm x 360 mm x 5 mm is available. In this volume any flat substrate can be placed with a substrate specific holder
Process
- Both thermal and plasma enhanced s-ALD
- flat substrates like polymer and metal foils, wafers, glass and porous flat substrates
- Product Links
-
SparkNano Labline Series 6" and 12" manufacturer page
