- CTechnano Coating Technologies
- Product model
- Stardust Series
- Type of product
- Deposition Tool
Fluidized bed reactor providing efficient coating for samples of various 0D-1D shapes and sizes.
- Technical features
- Small or medium size reactor: up to 50 g or 10 kg, substrate load.
- Stainless steel and borosilicate glass reactors.
- Precursors feeding system with 2-4 lines. Different precursors (cold and hot).
- Precursors feeding system equipped with fast pneumatic valves.
- Fluidization: Induced vibration and gas flow.
- Filters to prevent particles leaving reactor.
- Multi-section temperature control:
- Precursors, heating jackets, range 0-200ºC, resolution 1ºC.
- Chamber, range 0-200ºC, resolution 1ºC.
- Piping inlet and outlet of the chamber, range 0-150ºC, resolution 1ºC.
- Base pressure 10-1/10-3 mbar.
- Tool dimensions: 1100x600x1600 mm.
- Control system with touchscreen:
- System status information: gas flow, temperatures, pressure, and valves.
- Process monitoring: pressure and temperatures. Deviation alarms and safety locks.
- Recipes handling and real time monitoring.
- Customized characteristics upon request.
- Ergonomic design. Visual and alarms.
- O3 generator, plasma source, residual gas analyzer…
- Product Links
CTechnano Coating Technologies Stardust Series manufacturer page