Fluidized bed reactor providing efficient coating for samples of various 0D-1D shapes and sizes.

Specifications:

• Small or medium size reactor: up to 50 g or 10 kg, substrate load.
• Stainless steel and borosilicate glass reactors.
• Precursors feeding system with 2-4 lines. Different precursors (cold and hot).
• Precursors feeding system equipped with fast pneumatic valves.
• Fluidization: Induced vibration and gas flow.
• Filters to prevent particles leaving reactor.
• Multi-section temperature control:
  • Precursors, heating jackets, range 0-200ºC, resolution 1ºC.
  • Chamber, range 0-200ºC, resolution 1ºC.
  • Piping inlet and outlet of the chamber, range 0-150ºC, resolution 1ºC.
• Base pressure 10-1/10-3 mbar.
• Tool dimensions: 1100x600x1600 mm.
• Control system with touchscreen:
  • System status information: gas flow, temperatures, pressure, and valves.
  • Process monitoring: pressure and temperatures. Deviation alarms and safety locks.
  • Recipes handling and real time monitoring.
• Customized characteristics upon request.
• Ergonomic design. Visual and alarms.

Additional Options:

• O3 generator, plasma source, residual gas analyzer…