Atomic Layer Deposition
ALD PRODUCTS
ALD Systems
- Manufacturer
- Beneq
- Product model
- Prodigy™
- Type of product
- 200 mm Semiconductor Wafer Batch Production Tool
- Description
Beneq Prodigy™ is the ideal manufacturing solution for VCSEL, LED and MEMS manufacturers and foundries looking to enhance the device performance and reliability through an affordable stand-alone ALD batch tool. Beneq Prodigy provides best-of-breed passivation and/or encapsulation films across multiple wafer types and sizes.
Prodigy is a simple, yet elegant, solution for enhancing device performance on 75–200 mm wafers with a low-cost batch tool with the latest ALD technology.
Prodigy offers pure simplicity through an automated loader with horizontal wafer handling and easy maintenance & serviceability with easy side access.
- Technical features
Specifications:
Dimensions
3320x910x2400 mm
Integration
Stand-alone, SECS/GEM, SEMI S2 compliant
Batch Size
Up to 25x200 mm wafers, 50x150 mm wafers, 75x100 mm wafers
Safety Standards
SEMI S2
ALD Processes
Al2O3, TiO2, SiO2 and others
Processing Temperature
< 420 oC
Throughput: Al2O3 – 300 oC – 50 nm
>14 wafers/hour, 50 pcs 150 mm wafer batch
Substrate Sizes
75, 100, 150, or 200 mm
- Product Links
-
Beneq Prodigy™ manufacturer page
