The Beneq P1500 is the world’s largest ALD reactor. With a vacuum chamber width of 1.7 meters, this tool is uniquely designed to coat very wide area substrates and large batches of 3D components. As the latest innovation in Beneq’s P-Series, the P1500 continues to enable ALD on the biggest scale with viable high-volume manufacturing solutions.

The P1500 is used for optical coatings on large diameter substrates, anticorrosive coatings of semiconductor equipment parts, and various applications where ALD is used on glass or metal sheets.

Specifications: